This quantity is a part of the Ceramic Engineering and technology continuing (CESP) series. This sequence includes a selection of papers facing concerns in either conventional ceramics (i.e., glass, whitewares, refractories, and porcelain teeth) and complex ceramics. issues coated within the quarter of complicated ceramic comprise bioceramics, nanomaterials, composites, good oxide gasoline cells, mechanical houses and structural layout, complex ceramic coatings, ceramic armor, porous ceramics, and more.
Chapter 1 Microsensor Packaging and process Partitioning (pages 997–1009): Stephen D. Senturia and Rosemary L. Smith
Chapter 2 built-in Solid?State Sensors for computerized production (pages 1010–1018): okay. D. Wise
Chapter three Silicon Resonant Microsensors (pages 1019–1034): Martin A. Schmidt and Roger T. Howe
Chapter four influence of Liquid part at the PTCR habit of BaTiO3 (pages 1035–1043): ok. R. Udayakumar, ok. G. Brooks, J. A. T. Taylor and V. R. W. Amarakoon
Chapter five pressure Sensing Transducer for On?Vehicle Load Measuring platforms (pages 1044–1057): William J. Fleming and John Hutchinson
Chapter 6 Air?To?Fuel Sensors in accordance with Oxygen Pumping (pages 1058–1073): E. M. Logothetis
Chapter 7 Air?Fuel Ratio Sensors for car Use using ZrO2 Electrolytes (pages 1074–1078): Takao Sasayama, Seiko Suzuki, Minoru Ohsuga and Sadayasu Ueno
Chapter eight functionality of Commercially synthetic ZrO2 Oxygen Sensors at excessive Temperatures and occasional PO2 Atmospheres (pages 1088–1094): Michael J. Hanagan and Paul F. Johnson
Chapter nine Tin Oxide fuel Sensing Microsensors from Metallo?Organic Deposited (MOD) skinny motion pictures (pages 1095–1105): Adolph L. Micheli, Shih?Chia Chang and David B. Hicks
Chapter 10 fresh Sensors for automobile functions (pages 1106–1119): Masataka Naito
Chapter eleven Grain Boundary Engineering of Semiconducting Tin Oxide through Sol?Gel Coatings (pages 1120–1127): F. A. Selmi and V. R. W. Amarakoon
Chapter 12 Sol?Gel techniques for Fibers and flicks of Multicomponent fabrics (pages 1128–1134): William C. Lacourse and Sunuk Kim
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Extra resources for 14th Automotive Materials Conference: Ceramic Engineering and Science Proceedings, Volume 8, Issue 9/10
Package stresses can shift the resonant frequency and poor mounting rigidity can degrade the quality factor. In the case of quartz resonators, dual tuning fork designs have been developed which minimize the mounting problem by canceling any moments that would be imparted to the package. 1' In order to achieve high quality factors in resonant microstructures, 1028 a partial vacuum is needed to minimize viscous damping. Clearly, this is not possible for resonant gas or vapor sensors and these devices must be designed to operate with relatively low quality factors.
3 990 032. assigned to Colt Industries. November 2, 1976. 'J. E. Fritsch. S. Patent No. 4 367 656. assigned to MasseyFerguson. Inc.. January 1 I . 1983. 4J. T. Gunn. " Lawrence Berkeley Laboratories. Report LBL- 14024. February 1982. 1048 ‘B. Morten. eta/. , “Thick-Film Technology and Sensors,” Sensors and Actuators 4 237-45 (1983). 6R. Dell’Acqua. “ SAE Paper 860479. presented at the International Congress. Detroit. MI, February 24. 1986. ’A. Yorgiadis. “The Shear-Pin Force Transducer,” Measurement & Control, October, 173-78 (1986).
As we will discuss in the next section, the requirement of a static axial tension poses a material reliability problem for these devices. The resonant-diaphragm pressure sensor uses perturbation of the stretching potential energy term. Static pressure induces a large deflection of a silicon micromachined diaphragm, shown in Fig. 7 . The diaphragm is then thermally excited into small amplitude oscillations about the deflected position. Variations in the static deflection amplitude will produce variations in the stretching-induced axial 1026 tension, and hence shift the resonant frequency.
14th Automotive Materials Conference: Ceramic Engineering and Science Proceedings, Volume 8, Issue 9/10